Quality Made in Germany since 1995

Quality Made in Germany since 1995

操纵器

Manipulators

在质量控制和研究中，使用显微镜进行电子半导体测试同样不可或缺。特别是在“集成电路测试”领域，不仅需要最高的机械精度，还需要不断推出用于质量测试和研究的新仪器。

探针

集成电路结构的电气测量、电位对比、缺陷检测。
可选件：软件操作和高温或低温测试。内置压电平移器可将定位精度提高到10nm，包括压电控制的极平缓定位。
在“FEI 986 FC” FIB样品仓的最佳放置位置。
目测定位精度为1µm。

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光束消隐器

适应电子束光刻技术中开关过程的时间分辨率要求。
针对最短上升时间值进行了优化。
保证“100psec粒子数增长时间”，实际测量值为50至35psec。
40KeV主光束能量仍然可以用5V脉冲进行完全扫描。

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提升工具

用于在扫描电子显微镜观察试样时，在试样表面定位和放置针头。
用适配器安装在真空室的顶部。
针的三个正交运动方向（xyz）和绕自身轴线的旋转。
适用于高真空环境，通过真空导轨驱动。

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Prober

Electrical measurements on IC structures, potential contrast, detection of defects.
Options: Software operation and high or low temperature experiments.
Built-in piezo translators increase positioning accuracy to 10 nm including piezo-controlled, extremely gentle touchdown.
Optimal placement in the sample chamber of the “FEI 986 FC” FIB.
Positioning accuracy of 1μm under visual control.

Electrostatic beam blanking

Adapted to the time resolution requirements of the switching process in electron beam lithography.
Optimized for shortest rise time values.
Guaranteed “100 psec rise time”, actually measured between 50 and 35 picoseconds.
40 KeV primary beam energy can still be fully sampled with 5 V pulses.

Lift-out-Tool

Use to position and place a needle on a specimen surface while being observed by a scanning electron microscope.
Mounted with an adapter on the ceiling of the vacuum chamber.
Three orthogonal directions of motion for the needle (xyz) as well as rotation about its own axis.
High vacuum capability, drive via vacuum guide.

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