High vacuum compatible module for SEM
Compact design: 160 × 65 × 74 mm
Integrated XY cross table (20 × 20 mm travel range)
In-situ indentation with tilted mounting option
Observe crack propagation during loading
Ultra-precise piezo actuators for all axes
Interchangeable indenters: Vickers, Berkovich, Knoop
Movement speed: 1 nm/s to 4 mm/s
Laser-based Z-measurement with <3 nm accuracy
Ideal for targeted microhardness testing directly in the SEM
